2x Exelan, (EFEM, Mag7, Loader, RF cart missing) Process: oxide Wafer Size: 12 inch

AMAT Centura PC-II CH. Wafer size: 200mm Process: PVD

Make: Tokyo Electron Ltd.

Wafer Size: 12 inch

etcher

Etcher

Etcher

etcher

asher

Wafer Size: 6.0

Batch systems for plasma cleaning or etching. Currently configured with only one 17 in. x 14 in. ...

ULVAC - XeF2 Etch Release FRE-200E Manufacturer: ULVAC Model: FRE-200E Equipment Details: RF Powe...