Edwards IGX100L Vacuum Pump

• Edwards IGX100L Vacuum Pump
• iGX100L
• SPN: NRY0G9000D - DR
• Condition: OEM Refurbished
• Quantity Available: 12

Features & Benefits 

• zero maintenance between major overhauls

• continuous pumping duty throughout pressure range

• comprehensive set of networking options

• ethernet connectivity allows key data to be viewed via webpages

• modular design allows users to configure pump to suit individual needs

• compact footprint allows on-tool, close proximity & remote installation

• designed for energy efficiency

• high efficient cooling

• low noise & vibration

• low cost of ownership

• precision ceramic bearings

Applications

load lock • transfer • metrology • lithography • PVD process • PVD pre-clean • RTA • strip/ashing • oxide etch • silicon etch • metal etch • implant source

Alternative Pumps from our stock:

Edwards IGX100M Vacuum Pump

Edwards IGX600L Vacuum Pump

Edwards IGX100L Vacuum Pump NEW

Other pumps to select from our stock:

Ebara EV-M502N Dry Vacuum Pump

Ebara EV-S100N Dry Vacuum Pump NEW

Edwards IH1000 Vacuum Pump

2021 Edwards iH1000 Dry Pump

Edwards IH80 Vacuum Pump NEW

Click the link below for the pump stock list

Stock List and how to purchase

Blog Post

Why purchase From Tara Semi