Wafer Size: 300 Process: Poly No EFEM: Buffer chamber : NO VHP robot 4 Process chamber (3x ...

Wafer Size: 200 Process: CVD 3x DLH chamber, 8 Slot storage, 3x OEM12B RF Generator

300mm Producer Ceramic Heater AMAT Certificate

Category: Metrology Maker: KLA Model: MIS-200 Wafer Size: 200 Process: Inspection Config Re...

2 available 2003 and 2013/pictures are vin2003 as representative

Wafer Size: 150 Process: W CVD 2x W CVD Chamber, Lamp Type 8 Slot storage2x W CVD Chamber, L...

Wafer size: 150mm Process: TEOS 2 x CVD Ch, HOT Box v4

Wafer Size: 150 Process: Metal 2x MXP R2Chamber, Mech Clamp, 29 slot Sto Elevator 2x OEM 12...

Wafer Size: 150 Process: PECVD 3 Ch DxL, PECVD, 8 slot storage. Some missing

Wafer Size: 150 Process: WEB 6" 2x MARK II, 8 Slot storage, ( some missing)

Vintage: 2006 Complete and working system The unit was professionally deinstalled and removed ...