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1999 Ebara EPO-2228
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Tool Status Connected Wafer Size 200 mm Fab Section CMP Asset Description Ebara 222 Oxide CMP ...
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Ebara F-REX300
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total -7- Carton 1. EFEM 2. POLISHER #1 3. POLISHER #2 4. CLEANER 5. POWER BOX 6. PARTS #1 ...
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Ebara F-REX300
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total -7- Carton 1. EFEM 2. POLISHER #1 3. POLISHER #2 4. CLEANER 5. POWER BOX 6. PARTS #1 ...
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2008 Ebara F-REX300S II
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Attached pics are ; EFEM, Polisher, Cleaner, Power box, Monitor Rack, Parts box
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Ebara A30W
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Ebara A30W 125cfm Dry Pump- Tested to <1mtorr 25cfm, NW50 inlet, NW40 exhaust, 200-220v tested...
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Ebara A10S 42.2cfm Dry Pump
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Ebara A10S 42.2cfm Dry Pump Pumping Speed Nitrogen 42.2 CFM (1,199.6 l/m) Ultimate Pressure 3.00...
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Ebara PDV500 Dry Vacuum Pump, DPB00572, 453637
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Ebara EV-S100N Dry Pump, DKF01023, Vacuum, EMB-EVS2, 10000L/min, 3 Phase, 101263
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Ebara ESR100WN Dry Vacuum Pump w/ Controller, 453176
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Ebara EV-S20N Dry Pump, DKB00455, Vacuum, 1670L/min, 5.0 PA, 3 Phase, 453376
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Ebara 305W Turbomolecular Pump Controller 305, 105890
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Ebara 305W Turbomolecular Pump Controller 305, 105890 Used
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Ebara ET600W Turbo Molecular Pump Controller 600W
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Ebara ET600W Turbo Molecular Pump Controller 600W ETC04 PWM-20M, 423293 Used
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