TEL ALPHA 303 I-H Low K Anneal – 300mm

N&K 1512 Table top – 300 mm

AMAT Centura TPCC (nickel coated frame) 200 mm, with Tan Ox Chambers, can be retrofitted to RTP 2...

Vintage 2010

Nanometrics 8300 XSE for 150/200/300 mm

KLA Tencor Aleris 8350 for 300mm

KLA Tencor F5x for 300mm

(0.4um) 3 ports , 1 port 200mm SMIF, 2 x Ports 300mm Metrology and Defect inspection New Installed