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AMAT VIISta HC
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Ion Implanter
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LAM Concept Three Speed
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1999 CVD
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2007 TEL P-12XLn+
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2 available 12" Vintage: 2007 Prober
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2004 Hitachi S9380
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2004 SEM
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2006 DNS (Screen) RF3(RF-300A)
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6 available Coat / Developer 12" 2006
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2006 Canon FPA-5500iZa
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10 available 12" Vintage: 2006 (8)/ 2005 (1) Stepper/ scanner
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TEL ALPHA-303i
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12" LPCVD 2 available
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2007 TEL Lithius
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36 available 12" Coat/ Developer Vintage: 2007/ 2006/ 2005
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KLA-TENCOR SCD-XT
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12" Inspection/ measurement
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2000 AMAT Centura WxZ
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CVD
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2013 Samco RIE-331LC
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Dry Etcher 2013
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Disco DFD6341
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19 available Dicing saw
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