There are 2 systems available Modules for Machine 1438 Vintage 2016: - Versaline ICP LM / TM - ...

Still installed and idle Vintage is 2010 The system includes 2” and 4” platens PLASMATHERM 790...

PlasmaTherm Versaline ICP Dry Etching System

-PlasmaTherm LAPECVD (2014) 6-inch 5-wafer batch deposition system with LoadLock SiO2/SiN

LAPECVDs with 2x Loadlockports, 2x Processcambers and DMC/OCR reader The VERSALINE Large-Area...

PLASMA-THERM SLR 770 Inductively Coupled Plasma Etcher - Single Process Chamber with SLR (Shuttl...

DRY ETCHER C

PLASMATHERM ODYSSEY HDRF ASHER consisting of: - Model: Odyssey HDRF - Configured for 150mm wafe...

Used, looks complete, very clean 6 inch wafer

This system was only used in an R&D Lab for O2 Plasma clean of medical device. It is in excellent...

Dry Etch

Dry Etch