Canon FPA-3000i4
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Operational Status:
Installed / Running
Wafer Sizes:
6"/150mm
Intensity 6530 ( W/m2 ) LPA – 0...
ASML AT 1100 Twinscan
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ASML Twinscan AT 1100 Wafer Scanner
- Cymer Nanolith 7600A 193nm ArF Laser System
- Dual 300mm W...
2005 HITACHI CG4000
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SEM - Critical Dimension (CD) Measurement
Metrology Equipment
Date of Manufacture: 2005-07-15
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