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Hitachi Kokusai Electric VR-120S
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Inspection/ measurement
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Rudolph Technologies MATRIXS200E
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Inspection/ measurement
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DNS (Screen) SS-80BW-A
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Wafer scrubber
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1997 DNS SS-W80A-AR
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VINTAGE : MAR.1997 WAFER SIZE: 8 INCH PROGRESS TYPE: WET/ CMP COMPONENT : MAINFRAME CHEMICAL C...
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1999 AMAT Mirra 3400
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Comes with 4 W chambers VINTAGE : 1999 WAFER SIZE: 8 INCH PROCESS TYPE: TUNGSTEN FACTORY INTE...
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DNS (Screen) SS-80BW-AR
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2 available Wafer scrubber
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SEN NV-GSDIII-90
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Ion implanter
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Canon MAS-8220
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Stripper/ asher
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Ulvac SRH-420
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6 available 6" PVD/ sputter
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Advantest T6577
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LSI / IC Tester 9 available Vintage: 2006 (x1), rest unknown
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LAM V2-Exelan/TECO1.5_VCR
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2 available Dry etcher
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LAM V2 Kiyo CX
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Dry etcher 2 available
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