Tool status: Cold Shutdown Software version: 788 CIM: E84, SECS/GEM, GEM300 Hardware Configura...

Process UVC process Missing/ Faulty Parts/ Accessories List: Boards, Heater p 2

Tool Status Disconnected Wafer Size 300 mm Fab Section Thin Film Process UVC process Missing/...

Tool Status Disconnected Wafer Size 300 mm Fab Section Thin Film Process UVC Process Missing/...

Tool Status Connected Wafer Size 200 mm Fab Section CMP Asset Description Ebara 222 Oxide CMP ...

Genmark, Porta300P, 2 loadports with some spare parts Tool Status Disconnected Wafer Size 300 ...

AMAT, 300mm, CMP Retaining Rings Tool ID: CMP Retaining Rings

TEL, Tactrus NCCP, 300mm, Etch Connected in fab with 2 chms.

Tool Status Connected Wafer Size NA Fab Section Lab Asset Description RF/Plasma oxide depositi...

Wafer size: 200mm Fab section: thin film Asset description: precision 5000 CVD system Software...

Tool Status Running Wafers Wafer Size 300 mm Fab Section R&D Asset Description TEL NEXX APOLLO...

The missing parts are - eyepiece Lens Assy 1ea - Lamp housing 1ea of three is missing