8" - 0.1 micron Defect Sensitivity (PSL STD) - 0.02 ppm Haze Sensitivity - 0.002 ppm Haze Reso...

Description L W H Qty Main Body 90 78 100 1 Front Loader Unit 75 35 100 1 Refrigeration 84 35 ...

Description L W H Qty Main Body 92 85 100 1 Front Loader Unit 87 33 100 1 Refrigeration 85 38 ...

Altitude Sea Level Resolution 0.35 um Computer Type Vax Station with Expansion Unit Software M...

Volume: 200 Liter Test room: 575 x 550 x 645 mm (W x D x H) Temperature: -40°C to +180°C Heati...

150mm Through the wall installation Independent He Cooling Phase III Robot Phase III Cassette...

150mm Narrow Body Load Lock Through the Wall Installation Water cooled Cryo compressor MFC: S...

RIE 150mm SiO2, SiNx & Si 2 chambers with full gas panel Computerized endpoint system ESC wa...

Tool Status Running Wafers Wafer Size 300 mm Fab Section Diffusion Asset Description TEL Furna...

Tool Status Connected Wafer Size 300 mm Fab Section Lithography Asset Description Coat only To...

Tool Status Connected Size 300 mm Fab Section Diffusion Asset Description Epsilon3200 Single W...

TEL, P12XLn, 300mm Tool Status Disconnected Wafer Size 300 mm Fab Section Test Asset Descript...